AIXTRON’s product portfolio for compound semiconductors includes MOCVD Equipment based on the Planetary Reactor or Showerhead concept, systems for high-temperature applications and research systems. Customer may choose from several system configurations.
Benefits
Our customers benefit from a wide range of advantages with AIXTRON systems:
lower precursor consumption
greater throughput
ease of use
the production of homogenous material structures
high yields
clear transition between layers
excellent reproducibility of the manufactured materials.
The term Planetary Reactor® is a registered trademark.
German Version
